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3. UTILITY
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| a. Power supply |
It shall be a three-phase 220V 50 / 60Hz 30A is connected to the primary side NFB. |
| b. Pneumatic supply |
The main gas source for an 5kg / cm2 or more connected to the PM12 bulkhead connector. |
| Exhaust |
General Gas (pump):NW25*1。 |
| d. AIR consumption |
10.1 L/min |
| e. Vacuum PUMP |
Cooling water temperature: 20℃±5℃ |
| f. CONTROLLER |
Adopt equipment Mitsubishi Series control system |
| g. Air Master Systems |
Adopt equipment SMC solenoid valve |
| h. User interface |
human–computer interaction |
| i. Dimensions of the Machine |
2190 mm(L)× 1291 mm(W)× 1900 mm(H)(It does not include vacuum pump) |
| j. Weight of the Machine |
approximately 900kg |
| k. Hepa Unit |
Class#100 |
| l. EDWARDSGX600L PUMP Specification |
power 3Ø220V 50/60Hz 14A; Water Cooling System: Maximum supply pressure :5 KG; Minimum supply pressure :2KG; Cooling-water supply :10-30℃ |